This cursus is part of the MEMS & NEMS, Micro and Nanotechnology ELEC options. LELEC2895 is focused on the understanding and the design of micro-electromechanical devices (MEMS), on transducers (sensors, actuators) made using micro and nanofabrication technologies, to their co-integration with integrated circuits (IC), to their multiphysics simulation and characterisation, to their reliability and their interconnect.
The contribution of this Teaching Unit to the development and
command of the skills and learning outcomes of the programme(s) can be
accessed at the end of this sheet, in the section entitled
“Programmes/courses offering this Teaching Unit”.
At the end of this learning unit, the student is able to :
With respect to the AA referring system defined for the Master in Electrical Engineering, the course contributes to the develoopment, mastery and assessment of the following skills :
AA1.1, AA1.2, AA1.3
AA2.1, AA2.2, AA2.3, AA2.4, AA2.5
AA3.1, AA3.2, AA3.3
AA4.2, AA4.3, AA4.4
AA5.1, AA5.2, AA5.3, AA5.4, AA5.5, AA5.6
AA6.1, AA6.3, AA6.4
After this course, the student will be able to:
Describe the transduction principles and scaling effects
Understand specifications for a MEMS
Design MEMS and NEMS and use multiphysics simulation softwares and tools
Identify electronic circuits adapted to MEMS and NEMS
Identify fabrication techniques required to make such devices
Analyse the reliability of miniaturised devices
Present (report) and defend (slides) the results of a group project (with 2 to 4 students)
1. MEMS design methodology
2. Scale effects and transduction principles
3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...
4. Fabrication processes
5. MEMS and CMOS technology circuits co-integration
6. Interconnections and packaging
7. Multiphysics simulations and characterizations
The course is organised as following
8 sessions of theoretical lectures
3 sessions of exercices
2 tutorial sessions to become acquainted with the software required for the project
The project evaluation is based on the style and content of a written report and an oral presentation made by group. The exam is an open book format.
LELEC2560 Micro and Nanofabrication Techniques is a desirable prerequisite. Basic knowledge of electronics, solid-state physics, materials science and chemistry is an advantage.
Transparents disponibles sur Moodle
Livre de référence disponible à la BST (Ville Kaajakari, "Practical MEMS", Small Gear Publishing)