Design of micro and nanosystems

lelec2895  2020-2021  Louvain-la-Neuve

Design of micro and nanosystems
Due to the COVID-19 crisis, the information below is subject to change, in particular that concerning the teaching mode (presential, distance or in a comodal or hybrid format).
5 credits
30.0 h + 30.0 h
Q1
Teacher(s)
Language
English
Main themes
This cursus is part of the MEMS & NEMS, Micro and Nanotechnology ELEC options. LELEC2895 is focused on the understanding and the design of micro-electromechanical devices (MEMS), on transducers (sensors, actuators) made using micro and nanofabrication technologies, to their co-integration with integrated circuits (IC), to their multiphysics simulation and characterisation, to their reliability and their interconnect.
Aims

At the end of this learning unit, the student is able to :

1 With respect to the AA referring system defined for the Master in Electrical Engineering, the course contributes to the develoopment, mastery and assessment of the following skills :
  • AA1.1, AA1.2, AA1.3
  • AA2.1, AA2.2, AA2.3, AA2.4, AA2.5
  • AA3.1, AA3.2, AA3.3
  • AA4.2, AA4.3, AA4.4
  • AA5.1, AA5.2, AA5.3, AA5.4, AA5.5, AA5.6
  • AA6.1, AA6.3, AA6.4
After this course, the student will be able to:
  • Describe the transduction principles and scaling effects
  • Understand specifications for a MEMS
  • Design MEMS and NEMS and use multiphysics simulation softwares and tools
  • Identify electronic circuits adapted to MEMS and NEMS
  • Identify fabrication techniques required to make such devices
  • Analyse the reliability of miniaturised devices
  • Present (report) and defend (slides) the results of a group project (with 2 to 4 students)
 
Content
1. MEMS design methodology
2. Scale effects and transduction principles
3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...
4. Fabrication processes
5. Selection of electronic interface circuits
6. Multiphysics simulations 
Teaching methods

Due to the COVID-19 crisis, the information in this section is particularly likely to change.

The course is organised as following
  • 10 sessions of theoretical lectures, based on flipped classes helped by the resolution in students group of numerous examples and cases
  • 1 tutorial session related to the software tools 
  • 3 sessions of design practical works, with teaching support
  • 1 industrial seminar
Evaluation methods

Due to the COVID-19 crisis, the information in this section is particularly likely to change.

The course is subject to continuous evaluation for 2/3 of the final grade during the semester when submitting group work reports on the practical work sessions, and for 1/3 by an individual oral examination in session. The in-session exam is a closed book exam but is assisted by the course form. The distribution of marks may be waived in the event of a noticeable difference in performance between the written work and the final oral performance, in which case only the latter's mark will be considered. 
Other information
LELEC2560 Micro and Nanofabrication Techniques is a desirable prerequisite. Basic knowledge of electronics, solid-state physics, materials science and chemistry is an advantage.
Bibliography
Supports
  • Transparents disponibles sur Moodle/Slides available on Moodle
  • Livre de référence disponible à la Bibliothèque des Sciences et Technologies/Reference book available at the Science and Technology Library (Ville Kaajakari, "Practical MEMS", Small Gear Publishing)
Teaching materials
  • http://www.kaajakari.net/PracticalMEMS
Faculty or entity
Force majeure
Teaching methods
The course is organised as following
  • 10 sessions of theoretical lectures, based on flipped classes helped by the resolution in students group of numerous examples and cases
  • 1 tutorial session related to the software tools 
  • 3 sessions of design practical works, with teaching support
  • 1 industrial seminar
The sessions will be held online. 
 
Evaluation methods
The course is subject to continuous evaluation for 2/3 of the final grade during the semester when submitting group work reports on the practical work sessions, and for 1/3 by an individual oral examination in session. The in-session exam is an open book oral exam held online. To prepare the in-session exam, each student will be given one week ahead the planned exam date an exercise to prepare individually and to submit back before the exam. This preparation will support partly the discussions during the oral exam. The distribution of marks may be waived in the event of a noticeable difference in performance between the written work and the final oral performance, in which case only the latter's mark will be considered.
 


Programmes / formations proposant cette unité d'enseignement (UE)

Title of the programme
Sigle
Credits
Prerequisites
Aims
Master [120] in Physical Engineering

Master [120] in Electrical Engineering

Master [120] in Chemical and Materials Engineering

Advanced Master in Nanotechnologies