Teacher(s)
Language
English
> French-friendly
> French-friendly
Main themes
This cursus is part of the MEMS & NEMS, Micro and Nanotechnology ELEC options. LELEC2895 is focused on the understanding and the design of micro-electromechanical devices (MEMS), on transducers (sensors, actuators) made using micro and nanofabrication technologies, to their co-integration with integrated circuits (IC), to their multiphysics simulation and characterisation, to their reliability and their interconnect.
Learning outcomes
At the end of this learning unit, the student is able to : | |
| 1 |
With respect to the AA referring system defined for the Master in Electrical Engineering, the course contributes to the develoopment, mastery and assessment of the following skills :
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Content
1. MEMS design methodology
2. Scale effects and transduction principles
3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...
4. Fabrication processes
5. Selection of electronic interface circuits
6. Multiphysics simulations
2. Scale effects and transduction principles
3. Sensors and actuators: electrical, mechanical, thermal, optical, (bio)chemical, etc...
4. Fabrication processes
5. Selection of electronic interface circuits
6. Multiphysics simulations
Teaching methods
The course is organised as following
- 10 sessions of theoretical lectures, based on flipped classes helped by the resolution in students group of numerous examples and cases
- 1 tutorial session related to the software tools
- 3 sessions of design practical works, with teaching support
- 1 industrial seminar
Evaluation methods
The course is subject to continuous evaluation for 3/5 of the final grade during the semester when submitting group work reports on the practical work sessions, and for 2/5 by an individual oral examination in session, unless the mark of the individual oral examination is less than 10/20 in which case the final mark will be that of the individual oral examination only. The in-session exam is an open book exam assisted by a written preparation.The group work note is kept for all sessions of the same academic year.
Other information
LELEC2560 Micro and Nanofabrication Techniques is a desirable prerequisite. Basic knowledge of electronics, solid-state physics, materials science and chemistry is an advantage.
Online resources
Bibliography
Supports
- Transparents disponibles sur Moodle/Slides available on Moodle
- Livre de référence disponible à la Bibliothèque des Sciences et Technologies/Reference book available at the Science and Technology Library (Ville Kaajakari, "Practical MEMS", Small Gear Publishing)
Teaching materials
- http://www.kaajakari.net/PracticalMEMS
Faculty or entity
