Thin film materials can be found in many application areas as they are essential for the development of microelectronic systems, solar cells, power devices, passivation coatings, etc. In order for these systems to perform their function while limiting their failure, two main types of properties must be studied: their mechanical and electrical properties. In this context, electrical-nanoindentation is a remarkable technique that allows the simultaneous measurement of the mechanical and electrical responses of materials at sub-micron scales. During this presentation, we will review some case studies showing the capabilities of the electrical-nanoindentation technique and its potential applications.

Speaker: Morgan Rusinowicz graduated from the PHELMA engineering school (Grenoble-INP UGA, France) in 2019, specialising in materials science. He then completed his Ph.D. at the SIMaP laboratory of the University of Grenoble, supervised by Muriel Braccini and Fabien Volpi, finalized in 2022. The topic was the characterisation of the mechanical and electrical behaviour of ceramic/glass thin films (Cu2O, Si3N4, SiOCH) used in functional devices by an approach combining nanoindentation experiments coupled with electrical measurements and numerical simulations using the finite element method. Since early 2023, Mogan is now working as a post-doc at IMAP on electromechanical couplings in nanolaminate materials.