Micro and Nano Technologies and Systems

Figure : Concentration of bacterial cells on the capacitive sensor thanks to AC-electrosmosis

The group forms with the CeRMiN, the UCL Research center for micro- and nano-scopic materials and electronics devices a multidisciplinary team, involving both silicon device physicists, technologists and experimentalists, as well as circuit designers. It gathers about 50 members, out of which 5 professors and more than 36 PhD students and researchers.

Principal Investigators :

Denis Flandre, Laurent Francis, Isabelle Huynen, Sorin Melinte, Jean-Pierre Raskin

Research Labs : 

SOI Group, Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

Research Areas :     

This activity covers the characterization up to 110 GHz, of bulk and nanocomposite materials in various states: solids, foams, liquids, powders, gels, films, … The models created using these measurements allow to extend the range of application of nanostructures, and to develop new sensors and signal processing devices. Of current interest are ferromagnetic nanowires for tunable electronics, carbonated nanoparticles (carbon nanotubes, graphene) for intelligent packaging (EMI shielding, ESD protection, photovoltaic), and nanoporous thin film membranes for fuel cell applications.

Our current projects aim at understanding the fundamental nanoscience of man-made quantum structures, namely semiconductor nanodevices and hybrid inorganic-organic platforms for molecular opto-electronics and plasmonics. In particular, we use high-resolution nanolithography as well as soft-lithography and bottom-up fabrication techniques to engineer smart nano- and microsystems. Recently, our group started the development of cutting-edge instrumentation in the area of scanning tunneling spectroscopy and near-field experimental setups based on photon detection.

ICTEAM has been active in Silicon-on-Insulator (SOI) technology since 1986. Silicon-on-Insulator (SOI) has been a major theme of R&D for more than 20 years, leading to significant contributions with regards to e.g. double-gate MOSFETs, nanowires, high-temperature SOI CMOS, microwaves and millimeter-waves SOI MOSFETs and substrate, Ultra-Low-Power smart sensors (including biosensors) in terms of processing, characterization, simulation, modeling and design.

Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Research infrastructure :

Winfab is equipped with a complete pilot fabrication line on silicon/SOI substrates of about 1,000 m² for the rapid prototyping and validation of new fabrication steps and of new integrated devices or microsystems.

Electrical measurement set-ups available in WELCOME cover a large range of frequencies (from DC up to 110 GHz) and temperatures (from few mK up to 400°C) on wafer-scale as well as packaged circuits levels. Physical (e.g. interface or thin layer properties) and mechanical (adhesion, stress...) characterization are widely available in the CeRMiN environment.

Simulation tools include industry-standard softwares for integrated processes and devices. Device irradiation is available at the nearby cyclotron research centre on a bench qualified by ESA. The wide research results have been honoured by more than 50 invited presentations in international and national conferences, as well as by several awards.

Most recent publications

Below are listed the 10 most recent journal articles and conference papers produced in this research area. You also can access all publications by following this link : see all publications.

Journal Articles

1. Kazemi Esfeh, Babak; Kilchytska, Valeriya; Planes,N.; Haond, M.; Flandre, Denis; Raskin, Jean-Pierre. 28 nm FDSOI nMOSFET RF Figures of Merits and Parasitic Elements extraction at Cryogenic Temperature down to 77 K. In: I E E E Journal of the Electron Devices Society, Vol. 7, p. 810816 (2019). doi:10.1109/JEDS.2019.2906724. http://hdl.handle.net/2078.1/216352

2. Müller, Achim; Vu, Xuan T.; Pachauri, Vivek; Francis, Laurent; Flandre, Denis; Ingebrandt, Sven. Wafer-Scale Nanoimprint Lithography Process Towards Complementary Silicon Nanowire Field-Effect Transistors for Biosensor Applications. In: Physica Status Solidi. A: Applied Research, Vol. 1800234, p. 10 (2018). doi:10.1002/pssa.201800234. http://hdl.handle.net/2078.1/200179

3. Li, Guoli; Abliz, Ablat; Xu, Lei; André, Nicolas; Liu, Xingqiang; Zeng, Yun; Flandre, Denis; Liao, Lei. Understanding hydrogen and nitrogen doping on active defects in amorphous In-Gas-Zn-O thin-film transistors. In: Applied Physics Letters, Vol. 112, no.253504, p. 5 (2018). doi:10.1063/1.5032169. http://hdl.handle.net/2078.1/200129

4. Siddharta Garud; Nikhil Gampa; Thomas G. Allen; Ratan Kotipalli; Denis Flandre; Maria Batuk; Joke Hadermann; Marc Meuris; Jef Poortmans; Arno Smets; Bart Vermang. Surface Passivation of CIGS Solar Cells Using Gallium Oxide. In: Physica Status Solidi, Vol. 2015, no.1700826, p. 6 (2018). doi:10.1002/pssa.201700826. http://hdl.handle.net/2078.1/198366

5. Garud, Siddharta; Gampa, Nikhil; Allen, Thomas G.; Kotipalli, Ratan; Flandre, Denis; Batuk, Maria; Hadermann, Joke; Meuris, Marc; Poortmans, Jef; Smets, Arno; Vermang, Bart. Surface Passivation of CIGS Solar Cells Using Gallium Oxide. In: physica status solidi (a), Vol. 215, no.1700826, p. 6 (2018). doi:10.1002/pssa.201700826. http://hdl.handle.net/2078.1/198365

6. Haddad, Pierre-Antoine; Flandre, Denis; Raskin, Jean-Pierre. Intrinsic rectification in common-gated graphene field-effect transistors. In: Nano Energy, Vol. 43, p. 37-46. doi:10.1016/j.nanoen.2017.10.049. http://hdl.handle.net/2078.1/189953

7. Tang, Xiaohui; Raskin, Jean-Pierre; Lahem, Driss; Krumpmpann, Arnaud; Decroly, André; Debliquy, Marc. A Formaldehyde Sensor Based on Molecularly-Imprinted Polymer on a TiO2 Nanotube Array. In: IEEE Sensors Journal, Vol. 17, p. 15 (2017). doi:10.3390/s17040675. http://hdl.handle.net/2078.1/194698

8. Kotipalli, Raja Venkata Ratan; Poncelet, Olivier; Li, G.; Zeng, Y.; Francis, Laurent; Vermang, Bart; Flandre, Denis. Adressing the impact of rear surface passivation mechanisms on ultra-thin Cu(In,Ga)Se2 solar cells performances using SCAPS 1-D model. In: Solar Energy, Vol. 157, p. 603-613. doi:10.1016/j.solener.2017.08.055. http://hdl.handle.net/2078.1/189851

9. Li, Guoli; Kilchytska, Valeriya; André, Nicolas; Francis, Laurent; Zeng, Yun; Flandre, Denis. Leakage Current and Low-Frequency Noise Analysis and reduction in a Suspended SOI Lateral p-i-n Diode. In: IEEE Transactions on Electron Devices, , p. 8 (17/08/2017). doi:10.1109/TED.2017.2742863. http://hdl.handle.net/2078.1/187403

10. Majoul, Najla; Rasson, Jonathan; Francis, Laurent; Aouida, Salma; Bessais, Brahim. Immobilization of Hydroxocobalamin (vitamin B12) on aptes - functionalized mesoporous silicon. In: Biomedical Physics & Engineering Express, Vol. 3, no. 055007, p. 6 (13/09/2017). doi:10.1088/2057-1976/aa84c1 (Accepté/Sous presse). http://hdl.handle.net/2078.1/187228

Conference Papers

1. Delhaye, Thibault; Ge, C.; Francis, Laurent; Flandre, Denis; Cretu, E.. Macro-Modeling Library in Simscape for MEMS Pressure Sensors Based on Energy-Flow Paradigm. In: Proceedings of the conference Design, Test, Integration & Packaging of MEMS/MOEMS, IEEE, 2019. doi:10.1109/DTIP.2019.8752962. http://hdl.handle.net/2078.1/218573

2. Zhukova, Maria; Kotipalli, Raja Venkata Ratan; Poncelet, Olivier; Samain, Louise; Fourdrinier, Lionel; Flandre, Denis. Optoelectrical characterization and simulation of Cu2ZnSnS4absorber layers fabricated by DC magnetron sputtering and rapid thermal processing. http://hdl.handle.net/2078.1/193976

3. Zhukova, Maria; Kotipalli, Raja Venkata Ratan; Samain, Louise; Fourdrinier, Lionel; Flandre, Denis. Characterisation and simulation of Cu2ZnSnS4 absorber layers fabricated by sequential DC magnetron sputtering and rapid thermal processingG. In: proceedings of the 33rd European PV Solar Energy Conference and Exhibition, 2017, 6. http://hdl.handle.net/2078.1/193961

4. Ray Chaudhuri, Ashesh; Severi, S.; Helin, P.; Francis, Laurent; Tilmans, H.A.C.. Challenges of monolithic integration for SiGe MEMS technology. http://hdl.handle.net/2078.1/192904

5. Marchand, Nicolas; Walewyns, Thomas; Lahem, D.; Debliquy, M.; Francis, Laurent. Ultra-low-power chemiresistive microsensor array in a back-end CMOS process towards selective volatile compounds detection and IoT applications. http://hdl.handle.net/2078.1/192244

6. Ben Ali, Khaled; Gammon, P.M.; Chan, C.W.; Li, F.; Pathirana, V.; Trajkovic, T.; Gity, F.; Flandre, Denis; Kilchytska, Valeriya. Single Event Effects and Total Ionising Dose in 600V Si-on-SiC LDMOS Transistors for Rad-Hard Space Applications. In: Proceedings of the 2017 47th European Solid-State Device Research Conference (ESSDERC), 2017, p. 6. http://hdl.handle.net/2078.1/191145

7. Torchia, P.; Pampili, P.; O'Connell, J.; O'Brien, J.; White, M.; Schmidt, M.; Sheehan, B.; Waldron, F.; Holmes, J.D.; Monaghan, S.; Duffy, R.; Trajkovic, T.; Kilchytska, Valeriya; Gammon, P.; Cherkaoui, K.; Hurley, P.K.; Gity, F.. Influence of Free Radical Surface Activation on Si/SiC Heterogeneous Integration by Direct Wafer Bonding. In: Proceedings of the 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, 2017, p. 2. http://hdl.handle.net/2078.1/191138

8. Gammon, P.M.; Li, F.; Chan, C.W.; Gity, F.; Trajkovic, T.; Kilchytska, Valeriya; Pathirana, V.; Udugampola, N.; Ben Ali, Khaled; Flandre, Denis. Design and fabrication of a novel power Si/SiC LDMOSFET for high temperature applications. In: Proceedings of the 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EU, 2017, p. 2. http://hdl.handle.net/2078.1/191121

9. G. Kassa, Hailu; Ye, Ran; Sandu, Georgiana; Melinte, Sorin; Leclere, Philippe. Hybrid Organic/Inorganic Nanostructures for Energy Conversion and Storage Devices on Flexible Substrates. In: Proceedings of E-MRS Spring Meeting. p. 1. http://hdl.handle.net/2078.1/191082

10. Melinte, Sorin. Silicon Nanomaterials for Li-ion Energy Storage Microsystems. In: Proceedings of the 40th Annual Semiconductor International Conference, 2017, p. 1. http://hdl.handle.net/2078.1/191079