Micro and Nano Technologies and Systems

Figure : Concentration of bacterial cells on the capacitive sensor thanks to AC-electrosmosis

The group forms with the CeRMiN, the UCL Research center for micro- and nano-scopic materials and electronics devices a multidisciplinary team, involving both silicon device physicists, technologists and experimentalists, as well as circuit designers. It gathers about 50 members, out of which 5 professors and more than 36 PhD students and researchers.

Principal Investigators :

Denis Flandre, Laurent Francis, Isabelle Huynen, Dimitri Lederer, Sorin Melinte, Jean-Pierre Raskin

Research Labs : 

SOI Group, Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

Research Areas :     

This activity covers the characterization up to 110 GHz, of bulk and nanocomposite materials in various states: solids, foams, liquids, powders, gels, films, … The models created using these measurements allow to extend the range of application of nanostructures, and to develop new sensors and signal processing devices. Of current interest are ferromagnetic nanowires for tunable electronics, carbonated nanoparticles (carbon nanotubes, graphene) for intelligent packaging (EMI shielding, ESD protection, photovoltaic), and nanoporous thin film membranes for fuel cell applications.

Our current projects aim at understanding the fundamental nanoscience of man-made quantum structures, namely semiconductor nanodevices and hybrid inorganic-organic platforms for molecular opto-electronics and plasmonics. In particular, we use high-resolution nanolithography as well as soft-lithography and bottom-up fabrication techniques to engineer smart nano- and microsystems. Recently, our group started the development of cutting-edge instrumentation in the area of scanning tunneling spectroscopy and near-field experimental setups based on photon detection.

ICTEAM has been active in Silicon-on-Insulator (SOI) technology since 1986. Silicon-on-Insulator (SOI) has been a major theme of R&D for more than 20 years, leading to significant contributions with regards to e.g. double-gate MOSFETs, nanowires, high-temperature SOI CMOS, microwaves and millimeter-waves SOI MOSFETs and substrate, Ultra-Low-Power smart sensors (including biosensors) in terms of processing, characterization, simulation, modeling and design.

Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Research infrastructure :

Winfab is equipped with a complete pilot fabrication line on silicon/SOI substrates of about 1,000 m² for the rapid prototyping and validation of new fabrication steps and of new integrated devices or microsystems.

Electrical measurement set-ups available in WELCOME cover a large range of frequencies (from DC up to 110 GHz) and temperatures (from few mK up to 400°C) on wafer-scale as well as packaged circuits levels. Physical (e.g. interface or thin layer properties) and mechanical (adhesion, stress...) characterization are widely available in the CeRMiN environment.

Simulation tools include industry-standard softwares for integrated processes and devices. Device irradiation is available at the nearby cyclotron research centre on a bench qualified by ESA. The wide research results have been honoured by more than 50 invited presentations in international and national conferences, as well as by several awards.

Most recent publications

Below are listed the 10 most recent journal articles and conference papers produced in this research area. You also can access all publications by following this link : see all publications.

Journal Articles

1. Amor, Sedki; Kilchytska, Valeriya; Flandre, Denis; Galy, Philippe. Trap Recovery by in-Situ Annealing in Fully-Depleted MOSFET With Active Silicide Resistor. In: IEEE Electron Device Letters, Vol. 42, no.7, p. 1085-1088 (2021). doi:10.1109/LED.2021.3079244. http://hdl.handle.net/2078.1/250630

2. Roisin, Nicolas; Brunin, Guillaume; Rignanese, Gian-Marco; Flandre, Denis; Raskin, Jean-Pierre. Indirect light absorption model for highly strained silicon infrared sensors. In: Journal of Applied Physics, Vol. 30, no.5, p. 30 (2021). doi:10.1063/5.0057350 (Accepté/Sous presse). http://hdl.handle.net/2078.1/249729

3. Chen, Qi; Li, Guoli; André, Nicolas; Liu, Xingqiang; Xia, Zhen; Flandre, Denis; Liao, Lei. Origin of Low-Temperature Negative Transconductance in Multilayer MoS2 Transistors. In: Applied Physics Letters, , p. 10 (2021). doi:10.1063/5.0058545 (Accepté/Sous presse). http://hdl.handle.net/2078.1/249728

4. Nait Saada, Tamazouzt; Pang, Liuqing; Sravan Kumar, Kilaparthi; H.B. Dourado, André; D. Germano, Lucas; D. Vicentini, Eduardo; P.L. Batista, Ana; G.S. de Oliveira-Filho, Antonio; Dumeignil, Franck; Paul, Sébastien; Wojcieszak, Robert; Melinte, Sorin; Sandu, Georgiana; Petretto, Guido; Rignanese, Gian-Marco; Henrique Braga, Adriano; F. Rosado, Taissa; Meziane, Dalila; Boukherroub, Rabah; I. Córdoba de Torresi, Susana; G.M. da Silva, Anderson; Szunerits, Sabine. The importance of the shape of Cu2O nanocrystals on plasmon-enhanced oxygen evolution reaction in alkaline media. In: Electrochimica Acta, Vol. 390, no.138810, p. 9 (2021). doi:10.1016/j.electacta.2021.138810. http://hdl.handle.net/2078.1/249120

5. Lontchi Jioleo, Jackson; Doghmen, Hajer; Krumpmann, Arnaud; Snyders, Rony; Flandre, Denis. Depletion effects in moderately doped TiO2 layers from C–V characteristics of MIS structures on Si. In: Applied Physics Express, Vol. 14, no.5 (2021). doi:10.35848/1882-0786/abfb61. http://hdl.handle.net/2078.1/248920

6. Morelle, Alban; Vandermolen, Eric; Kilchytska, Valeriya; Raskin, Jean-Pierre; Flandre, Denis. Improved Split CV Mobility Extraction in 28 nm Fully Depleted Silicon on Insulator Transistors. In: IEEE Electron Device Letters, Vol. 42, no.5, p. 661-664 (2021). doi:10.1109/LED.2021.3065002. http://hdl.handle.net/2078.1/248904

7. Kilchytska, Valeriya; Makovejev, Sergej; Esfeh, Babak Kazemi; Nyssens, Lucas; Halder, Arka; Raskin, Jean-Pierre; Flandre, Denis. Extensive Electrical Characterization Methodology of Advanced MOSFETs Towards Analog and RF Applications. In: I E E E Journal of the Electron Devices Society, Vol. 9, p. 500-510 (2021). doi:10.1109/JEDS.2021.3057798. http://hdl.handle.net/2078.1/248902

8. Lakhdar Sidi Salah; Nassira Ouslimani; Mohamed Chouai; Danlée, Yann; Huynen, Isabelle; Hamoune Aksas. Predictive optimization of electrical conductivity of polycarbonate composites at different concentrations of carbon nanotubes. In: Materials, Vol. 14, p. 1687-2006 (2021). doi:10.3390/ma14071687. http://hdl.handle.net/2078.1/244736

9. Saoutieff, Elise; Polichetti, Tiziana; Jouanet, Laurent; Faucon, Adrien; Vidal, Audrey; Pereira, Alexandre; Boisseau, Sébastien; Ernst, Thomas; Miglietta, Maria Lucia; Alfano, Brigida; Massera, Ettore; De Vito, Saverio; Bui, Do Hanh Ngan; Benech, Philippe; Vuong, Tan-Phu; Moldovan, Carmen; Danlée, Yann; Walewyns, Thomas; Pétré, Sylvain; Flandre, Denis; Ancans, Armands; Greitans, Modris; Ionescu, Adrian M. A Wearable Low-Power Sensing Platform for Environmental and Health Monitoring: The Convergence Project. In: Sensors, Vol. 21, no.5, p. 21 (2021). doi:10.3390/s21051802. http://hdl.handle.net/2078.1/244265

10. Tang, Xiaohui; Debliquy, Marc; Lahem, Driss; Yan, Yiyi; Raskin, Jean-Pierre. A Review on Functionalized Graphene Sensors for Detection of Ammonia. In: Sensors, Vol. 2021, no.21 (4), p. 1443 (2021). doi:10.3390/s21041443. http://hdl.handle.net/2078.1/243740

Conference Papers

1. Delhaye, Thibault; Le Brun, Grégoire; Flandre, Denis; Raskin, Jean-Pierre. Bottom-Up Life-Cycle Assessment of MEMS Piezoresistive Pressure Sensors. 2021 xxx. http://hdl.handle.net/2078.1/250447

2. Yan, Yiyi; Flandre, Denis; Kilchytska, Valeriya; Faniel, Sébastien; Tang, Xiaohui; Raskin, Jean-Pierre. Determination of Carrier Lifetime in Silicon Using an Ultra-thin Al2O3/SiO2 Dielectric Stack. In: Proceedings of the 2021 IEEE Latin America Electron Devices Conference (LAEDC), 2021 xxx. http://hdl.handle.net/2078.1/248901

3. Francis, Laurent; Vercauteren, Roselien; Leprince, Audrey; Mahillon, Jacques. Stable Porous Silicon Membranes for Fast Bacterial Detection. In: Proceedings of the 1st International Conference on Micromachines and Applications (ICMA 2021), 2021 xxx. http://hdl.handle.net/2078.1/248658

4. Puyol Troisi, Rafael; Pétré, Sylvain; Danlée, Yann; Walewyns, Thomas; Francis, Laurent; Flandre, Denis. Design Considerations of Ultra-Low-Power Polymer Gas Microsensors Based on Noise Analysis. In: Proceedings of the 4th International Conference nanoFIS 2020—Functional Integrated nano Systems, 2020 xxx. http://hdl.handle.net/2078.1/243613

5. Raskin, Jean-Pierre. SOI technologies from digital to RF and beyond. In: Intelligent Semiconductor for Technology Convergence, nano-KISS Short Course, 2020, pp 28-64 xxx. http://hdl.handle.net/2078.1/241178

6. Khiara, N.; Onimus, F.; Dupuy, L.; Crocombette, J.-P.; Pardoen, Thomas; Raskin, Jean-Pierre; Brechet, Y.. Un nouveau mécanisme de fluage d’irradiation induit par les cascades de déplacements générées par l’irradiation. 2020 xxx. http://hdl.handle.net/2078.1/241177

7. Melinte, Sorin. Building-Integrated Energy Storage: Smart Windows. 2020 xxx. http://hdl.handle.net/2078.1/240888

8. Vercauteren, Roselien; Leprince, Audrey; Mahillon, Jacques; Francis, Laurent. Porous Silicon Biosensor for the Detection of Bacteria through Their Lysate. In: Selected Papers from the 1st International Electronic Conference on Biosensors (IECB 2020), MDPI: Switzerland, 2020, 15 xxx. doi:10.3390/IECB2020-07041. http://hdl.handle.net/2078.1/238072

9. Vandermolen, E.; Ferrandis, P.; Allibert, F.; Nabet, Massinissa; (Kees) de Groot, CH.; Raskin, Jean-Pierre; Cassé, M.. Characterization of deep levels in high resistivity substrates by Photo-Induced Current Transient Spectroscopy. 2020 xxx. http://hdl.handle.net/2078.1/237802

10. Le Brun, Grégoire; Raskin, Jean-Pierre. Life cycle approach for electronics eco-design: case study on paper-based water quality sensors. 2020 xxx. http://hdl.handle.net/2078.1/237801